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366.090 - Micro- and nanoelectromechanical systems (VO 3.0ECTS)
Schmid, Ulrich
2023W
Schmid, Ulrich
Disnan, Davide
Rauf, Abdul
Moll, Philipp

E366 Institute of Sensor and Actuator Systems
2022W
Schmid, Ulrich
Disnan, Davide
Rauf, Abdul

E366 Institute of Sensor and Actuator Systems
2021W
Schmid, Ulrich
Disnan, Davide
Weißenbach, Josef

E366 Institute of Sensor and Actuator Systems
2020W
Schmid, Ulrich
Platz, Daniel
Disnan, Davide

E366 Institute of Sensor and Actuator Systems
2019W
Schmid, Ulrich
Platz, Daniel
Fleckl, Gernot

E366 Institute of Sensor and Actuator Systems
2018W
Schmid, Ulrich
Platz, Daniel

E366 Institute of Sensor and Actuator Systems
2017W
Schmid, Ulrich
Platz, Daniel

E366 Institute of Sensor and Actuator Systems
2016W
Schmid, Ulrich
Schneider, Michael

E366 Institute of Sensor and Actuator Systems
2015W
Schmid, Ulrich
Schneider, Michael

E366 Institute of Sensor and Actuator Systems
2014W
Schmid, Ulrich
Bittner, Achim

E366 Institute of Sensor and Actuator Systems
2013W
Schmid, Ulrich
Bittner, Achim

E366 Institute of Sensor and Actuator Systems